FS-Pro semiconductor parameter tester (I-V test, C-V test, 1 / f noise test)
Features
√ Integrated test
FS-Pro ™ integrates DC test, pulse test, transient test, capacitance test and low-frequency noise (1 / f noise) test in a single instrument. It can complete all low-frequency parameterized characterization without changing wires and re-probing.
√ Super fast
FS-Pro ™ introduces artificial intelligence-driven test technology. Compared to traditional semiconductor parameter test systems, its test speed can reach up to 10 times, and it maintains test accuracy while maintaining a strong speed increase.
√ Modular architecture
FS-Pro ™ adopts a modular architecture, which can be expanded according to requirements while maintaining a compact body. It also supports multi-channel parallel testing, up to 20 channels, and easily handles high-density production testing.
√ Easy operation
The built-in measurement control software LabExpress ™ has an intuitive user graphical interface, which can complete powerful test analysis functions with just a few clicks of the mouse. It can also support a variety of probe stations and matrix switches, etc., and easily complete the automation of wafer-level data. The test task provides a complete solution for semiconductor manufacturing.
√ Unique 1 / f noise test capability
Especially for the testing and application of advanced process devices, two-dimensional material devices, and photodetectors, 1 / f noise is one of the important intrinsic parameters of the device. 1 / f noise performance restricts the device's practical application ability, and 1 / f noise is extensive. Ground exists in semiconductor devices with various components and structures, and it also sensitively reflects many potential defects of materials and devices. Therefore, the measurement and analysis of 1 / f noise has become a new method for evaluating the quality characterization and reliability of semiconductor devices. .
Main component performance indicators
FS380 high-precision source measurement unit SMU
● DC test
± 200V / 1A range, maximum 200W output power, minimum 30fA current measurement accuracy, 30uV voltage measurement accuracy, four-quadrant operation
● Pulse test
± 200V / 3A range, maximum 480W output power, minimum 5pA current measurement accuracy, 30uV voltage measurement accuracy, minimum pulse width 50us
● Transient test
Arbitrary waveform output, highest sampling rate 1.8MS / s, minimum 10us time step
● Capacitance test (CV)
± 200V / 1A range, 10Hz-10kHz bandwidth, 20fF ~ 1mF measurement range
● 1 / f noise test
Bandwidth 0.1Hz-100KHz, 1e-28A ^ 2⁄Hz background noise, 200V Bias, 8s / bias test speed;
FS336 external LCR module
● Capacitance test (CV, CF)
● ± 40V range, 40Hz ~ 8MHz bandwidth
● 100fF ~ 10mF measurement range
Labexpress graphical test software
LabExpress ™ measurement software provides complete DC, pulse, transient, capacitance and noise test functions, built-in common MOSFET, BJT, diode, resistor, capacitor type library, rich and complete test types, even newcomers without device knowledge can easily Get started, and provide a complete set of solutions for the daily application of semiconductor fabs. In terms of test data analysis functions, LabExpress ™ is not inferior either. Rich curve transformation and drawing functions and common algebra operations make the analysis of instant results easier.
Industry usage
In the industrial field, FS-Pro ™ has been adopted by many of the world's leading design companies and semiconductor foundries, IDM and design companies. Accuracy, speed and reliability have passed stringent industrial certifications. In the field of scientific research, FS-Pro ™ has been adopted by dozens of universities and research institutions and has supported the publication of dozens of high-end academic papers. Low-frequency noise is increasingly recognized by scholars as an effective non-damaging experimental method. FS-Pro ™, as the only semiconductor parameter analyzer with integrated noise test function, is becoming more and more indispensable in the development of cutting-edge new materials and devices. .
